規(guī)格
| 類型 | IC6 | |
|---|---|---|
| 測量性能 | ||
| 分辨率 (1) | 0.00433 Å/s/M | |
| 晶體頻率偏移 | 1.5 MHz | |
| 晶體范圍和精確性（來自 100-ms 樣品） | 6.0 to 4.5 MHz +/- 0.0035 Hz | |
| 厚度精度 (2) | 0.5% | |
| 測量頻率 | 10 Hz | |
| 多個測量值平均 | 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed | |
| 設計功能 | ||
| Auto Z | yes | |
| 自動色調 | yes | |
| 共沉積 | yes (up to 6 sources) | |
| 過程配方和數(shù)據(jù)管理 | ||
| 材料計劃 | 32 | |
| 過程層（每個過程） | 200 | |
| 過程 | 50 (processes can be linked together) | |
| USB 存儲器 | yes | |
| 數(shù)據(jù)記錄 | yes | |
| 硬件功能 | ||
| 傳感器 (3) | | |
| 單 | 8 | |
| 雙 / CrystalTwo® | 4 / 8 (with CrystalTwo® Switch) | |
| CrystalSix® | 8 | |
| Crystal 12® | 8 | |
| 通用 | 8 | |
| 來源控制 | | |
| 來源數(shù)量 (4) | up to 6 | |
| 來源控制電壓 | 0 to +/-10 V, adjustable | |
| 輸出分辨率 | 15 bits over full range (0 to 10V) | |
| 坩堝位置 | 64 | |
| 輸入 / 輸出 | | |
| 輸入 | 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground | |
| 輸出 | 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs | |
| 記錄器輸出 (4) | 0 to +10 V, adjustable | |
| 邏輯語句 | 100 fully programmable; up to 5 actions, 5 events per statement | |
| 通信 | | |
| 標準 | RS232 | |
| 可選 | Ethernet | |
| 顯示器 | ||
| 厚度分辨率 | 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 kÅ | |
| 速率分辨率 | 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater 0.01 for 0 to 99.99 Å/s 0.1 for 100 to 999.9 Å/s | |
| 操作 | ||
| 電源要求 | 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz | |
| 工作溫度 | 0 to 50 C (32 to 122 F) | |
| 尺寸，不包括安裝件（高 x 寬 x 深） | 5.25” x 19” x 13” (133mm x 483mm x 330 mm) | |
| 重量 | 23 lbs (10.5 kg) | |
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