它的主要特點(diǎn)是：
•Automated sequential sputtering 自動(dòng)順序?yàn)R射兩層不同的成膜材料
•Dual sputter head 雙濺射鍍膜頭
•Large format chamber 大腔室（300 mm D x 127 mm H，可選214mmH的高腔室）
•Coat logging facility 鍍膜日志功能（記錄最后100條執(zhí)行過(guò)的鍍膜參數(shù)）
•Fully automated touch-screen control 全自動(dòng)觸摸屏控制
•Customer defined coating protocols 用戶自定義鍍膜方案
•High resolution turbomolecular pumping渦輪分子泵抽真空，高分辨鍍膜
•Vacuum shutdown 真空閉鎖功能
•Dual channel film thickness monitor module，Q300T D can be fitted with an optional dual film thickness monitor (FTM), which measures the coating thickness on two quartz crystal monitors located within the chamber 雙通道膜厚監(jiān)控模塊
•A flat, adjustable stage capable of accepting 4” (101.6 mm) wafers is supplied as standard with the Q300T D. This stage has a rotation speed of 14 to 38 rpm.As an accessory a 6”(152.4 mm) wafer stage is available 大樣品臺(tái)
•An optional lockable emergency stop switch is located in a position easily accessible for the operator, on top of the coater, to immediately cut power to the unit. 緊急停止開(kāi)關(guān)
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