詳細(xì)介紹
- BX53M反射和反射/透射觀察機(jī)架
- 顯微鏡支架
- 鏡筒
- 照明器
- 光源
- 物鏡轉(zhuǎn)換器
- 滑塊
- BX53M IR觀察
- BX53M偏光觀察
- BXFM系統(tǒng)
正置金相顯微鏡BX53M產(chǎn)品介紹:
*系統(tǒng)化模塊化的設(shè)計(jì)能夠?qū)崿F(xiàn)多種配置,以滿足用戶的各種要求。
LED照明
BX53M為反射光和透射光照明提供了高強(qiáng)度的白光LED光源。無論強(qiáng)度是多少,LED都保持著一致的色溫。LED提供了高效而長壽命的照明,是材料學(xué)檢測(cè)應(yīng)用的理想工具。
BX53M同時(shí)配備了一個(gè)適配器,以抬升照明器,適應(yīng)更高的樣品。
機(jī)架組合 | 圖號(hào) | 可用于反射光 | 可用于透射光 | 樣品高度 |
---|---|---|---|---|
BX53MRF-S | 1 | yes | no | 0-65 mm |
BX53MTRF-S | 2 | yes | yes | 0-35 mm |
BX53MRF-S + BX3M-ARMAD | 1、3 | yes | no | 40-105 mm |
BX53MTRF-S + BX3M-ARMAD | 2、3 | yes | yes | 40-75 mm |
FN | 類型 | 角度類型 | 圖像 | 屈光度調(diào)節(jié)裝置數(shù) | ||
---|---|---|---|---|---|---|
1 | U-BI30-2 | 22 | 雙目 | 固定式 | 倒像 | 1 |
2 | U-TBI-3 | 22 | 雙目 | 傾斜式 | 倒像 | 1 |
3 | U-TR30-2 | 22 | 三目 | 固定式 | 倒像 | 1 |
U-TR30IR | 22 | IR用三目 | 固定式 | 倒像 | 2 | |
U-ETR-4 | 22 | 三目 | 固定式 | 正像 | 2 | |
U-TTR-2 | 22 | 三目 | 傾斜式 | 倒像 | 2 | |
U-SWTR-3 | 26.5 | 三目 | 固定式 | 倒像 | 2 | |
U-SWETTR-5 | 26.5 | 三目 | 傾斜式 | 正像 | 2 | |
U-TLU | 22 | 單口鏡筒 | — | — | — | |
U-TLUIR | 22 | IR用單口鏡筒 | — | — | — | |
編碼功能 | 光源 | BF | DF | DIC | POL | IR | FL | 混合A | AS/FS | ||
---|---|---|---|---|---|---|---|---|---|---|---|
1 | BX3M-RLAS-S | 3個(gè)固定式分光鏡組件位 置 | LED-內(nèi)置 | yes | yes | yes | yes | yes | yes | ||
2 | BX3M-URAS-S | 4個(gè)可換裝的分光鏡組件位置 | LED | yes | yes | yes | yes | yes | yes | ||
鹵素?zé)?/td> | yes | yes | yes | yes | yes | yes | yes | ||||
汞燈/光導(dǎo) | yes | yes | yes | yes | yes | yes | yes | ||||
3 | BX3M-RLA-S | LED | yes | yes | yes | yes | yes | yes | |||
鹵素?zé)?/td> | yes | yes | yes | yes | yes | yes | yes | ||||
4 | BX3M-KMA-S | LED-內(nèi)置 | yes | yes | yes | yes | |||||
5 | BX3-ARM | 透射光觀察專用鏡臂 | |||||||||
6 | U-KMAS | LED | yes | yes | yes | yes | |||||
鹵素?zé)?/td> | yes | yes | yes | yes | yes |
物鏡 | 放大倍率 | NA(數(shù)值孔徑) | WD(mm) | 蓋玻片厚度(mm) | 硅厚度(mm) | 分辨率(um)(孔徑光闌全開) |
---|---|---|---|---|---|---|
LMPLN-IR | 5X | 0.1 | 23 | 0~0.17 | _ | 6.71 |
10X | 0.3 | 18 | 0~0.17 | _ | 2.24 | |
LCPLN-IR (適合FN22,不適合FN26.5) | 20X | 0.45 | 8.3 | 0~1.2 | 0~1.2 | 1.49(使用1100mm波長) |
50X | 0.65 | 4.5 | 0~1.2 | 0~1.2 | 1.03(使用1100mm波長) | |
100X | 0.85 | 1.2 | 0~0.07 | 0~1.0 | 0.79(使用1100mm波長) | |
無校正環(huán)物鏡觀察效果 | 有校正環(huán)物鏡觀察效果 |
正置金相顯微鏡BX53M基本參數(shù):
SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR GENERAL USE
| Entry | Standard | Advanced | ||||||
Optical system | UIS2 optical system (infinity-corrected) | ||||||||
Main unit | Microscope frame | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | ||
Focus | Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle | ||||||||
Max. specimen height | Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD) | ||||||||
Observation tube | Wide field (F.N.22) | U-TR30-2-2 Inverted: trinocular | |||||||
Illumination | Reflected light Transmitted light | BX3M-KMA-S White LED, BF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking | BX3M-RLAS-S Coded, White LED, BF/DF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking | ||||||
- | BX3M-LEDT White LED Abbe/long working distance condensers | - | BX3M-LEDT White LED Abbe/long working distance condensers | - | BX3M-LEDT White LED Abbe/long working distance condensers | ||||
Revolving nosepiece | U-5RE-2 For BF: Quintuple | U-D6BDRE For BF/DF: Sextuple | U-D6BDRES-S For BF/DF : Sextuple, Coded | ||||||
Eyepiece(F.N.22) | WHN10 WHN10X-H | ||||||||
MIX observation | - | BX3M-CB Control box BX3M-HS Hand switch U-MIXR MIX slider for reflected light observation U-MIXRCBL Cable for MIXR | |||||||
Condenser (Long working distance) | - | U-LWCD | - | U-LWCD | - | U-LWCD | |||
Power cable | UYCP (x1) | UYCP (x2) | |||||||
Weight | Reflected: approx.15.8 kg (microscope frame 7.4 kg) Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg) | ||||||||
Objectives | MPLFLN set | MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation | - | ||||||
MPLFLN BD set | - | MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | |||||||
MPLFLN-BD, LMPLFLN-BD set | - | MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | |||||||
Stage (X x Y) | 76 mm x 52 mm set | U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment | |||||||
100 mm x 10 0mm set | U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis | ||||||||
100 mm x 100 (G) mm set | U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate) | ||||||||
150 mm x 100 mm set | U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis | ||||||||
150 mm x 100 (G) mm set | U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate) | ||||||||
Option | MIX observation set* | BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL | - | ||||||
DIC* | U-DICR | ||||||||
Intermediate Tubes | U-CA, U-EPA2, U-TRU-1-2, U-TRU | ||||||||
Filters | U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR | ||||||||
Filter for condenser | 43IF550-W45, U-POT | ||||||||
Stage plate | U-D6BDRES-S, U-D6RE-ESD-2, U-D6BDRES-ESD, U-5RES-ESD | ||||||||
Specimen holder | U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4 | ||||||||
Handle rubber | U-SHG, U-SHGT |
*Cannot be used with U-5RE-2.
BX53M / BXFM ESD UNITS
Items | Microscope frame | BX53MRF-S, BX53MTRF-S |
Illuminator | BX3M-KMA-S, BX3M-RLA-S, BX3M-URAS-S, BX3M-RLAS-S | |
Nosepiece | U-D6BDRES-S, U-D6RE-ESD, U-D5BDREMC-ESD, U-5RES-ESD | |
Stage | U-SIC4R2, U-SIC4L2, U-MSSP4 |
SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR DEDICATED USE
| Fluorescence | Infrared | Polarized | ||||
Optical system | UIS2 optical system (infinity-corrected) | ||||||
Main unit | Microscope frame | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/ Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | ||
Focus | Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle | ||||||
Max. specimen height | Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD) | ||||||
Observation tube | Wide field (F.N.22) | U-TR30-2 Inverted: trinocular | U-TR30IR Inverted: trinocular for IR | U-TR30-2 Inverted: trinocular | |||
Polarized Light Intermediate Attachment (U-CPA) | Bertrand Lens | - | - | Focusable | |||
Bertrand Field Stop | - | - | ø3.4 mm diameter (fixed) | ||||
Engage or disengage Bertrand lens changeover between orthoscopic and conoscopic observation | - | - | Position of slider ● in Position of slider ○ out | ||||
Analyzer Slot | - | - | Rotatable Analyzer with Slot (U-AN360P-2) | ||||
Illumination | Reflected light | FL observation | BX3M-URAS-S Coded, 100 W mercury lamp, 4 position mirror unit turret, (standard: WB, WG, WU+BF etc) With FS, AS (with centering mechanism), With shutter mechanism | - | - | ||
IR observation | - | BX3M-RLA-S 100W halogen lamp for IR, BF/IR, AS (with centering mechanism) U-LH100IR (Including 12V 10W HAL-L) 100W Halogen light source for IR TH4-100 100W power supply TH4-HS Hand switch U-RMT Extension cord | - | ||||
Transmitted light | POL observation | - | - | BX3M-LEDT White LED Abbe/long working distance condensers | |||
Revolving nosepiece | U-D6BDRES-S For BF/DF : Sextuple, Coded | U-5RE-2 For BF : Quintuple | U-P4RE Quadruple, centerable attachable components 1/4 wavelength retardation plate (U-TAD), tint plate (U-TP530) and various compensators can be attached using plate adapter (U-TAD) | ||||
Eyepiece(F.N.22) | WHN10X | ||||||
WHN10X-H | CROSS-WHN10X | ||||||
Mirror units | U-FDF For BF, detectable ND filter U-FBFL For BF, built-in ND filter U-FWUS For Ultra Violet-FL U-FWBS For Blue-FL U-FWGS For Green-FL | - | |||||
Filter / Polarizer / Analyzer | U-25FR Frost filter | U-BP1100IR/U-BP1200IR Band path filters for IR | 43IF550-W45 Green filter | ||||
U-POIR Reflected polarizer slider for IR | U-AN360IR Rotatable analyzer slider for IR | U-AN360P-2 360° Dial-rotatable Rotatable minimum angle 0.1° | |||||
Condenser | U-LWCD Long working distance | - | U-POC-2 Achromat strain-free condenser. 360°rotatable polarizer with swing-out achromatic top-lens. Click stop at position "0°" is adjustable. NA 0.9 (top-lens in) / NA 0.18 (top-lens out) Aperture iris diaphragm: adjustable from 2 mm to 21 mm diameters | ||||
Slider / Compensators | - | U-TAD Slider (Plate adapter) | |||||
U-TP530 / U-TP137 Compensators | |||||||
Power cable | UYCP (x1) | UYCP (x2) | UYCP (x1) | ||||
Weight | Reflected: approx.15.8 kg (microscope frame 7.4 kg) | Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg) | Approx.18.9 kg (microscope frame 7.4 kg) | Approx.16.2 kg (microscope frame 7.6 kg) | |||
Reflected FL light source | Light guide | U-HGLGPS, U-LLGAD, U-LLG150, SHI-130OL Light guide set | - | - | |||
Mercury lamp | U-LH100HGAPO1-7, USH-103OL (x2), U-RFL-T, U-RCV Mercury lamp set | - | - | ||||
Objectives | MPLFLN set | MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation | - | - | |||
MPLFLN BD set | MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | - | - | ||||
MPLFLN-BD, LMPLFLN-BD set | MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | - | - | ||||
IR set | - | LMPLN5XIR,10XIR,LCPLN20XIR,50XIR,100XIR IR observation | - | ||||
POL set | - | - | UPLFLN4XP,10XP,20XP,40XP POL observation | ||||
Stage (X x Y) | 76 mm x 52 mm set | U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment | |||||
100 mm x 10 0mm set | U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis | ||||||
100 mm x 100 (G) mm set | U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate) | ||||||
150 mm x 100 mm set | U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis | ||||||
150 mm x 100 (G) mm set | U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate) | ||||||
POL set | - | I-SRP-1-2+U-FMP Polarizing rotatable stage + Mechanical stage | |||||
Option | MIX observation set* | BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL | |||||
DIC* | U-DICR | ||||||
Intermediate Tubes | U-CA, U-EPA2, U-TRU-1-2, U-TRU | ||||||
Filters | U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR | ||||||
Filter for condenser | 43IF550-W45, U-POT | ||||||
Stage plate | U-WHP64, BH2-WHR43, BH2-WHR54, BH2-WHR65, U-WHP2, BH2-WHR43 | ||||||
Specimen holder | U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4 | ||||||
Handle rubber | U-SHG, U-SHGT |
*Cannot be used with U-5RE-2
正置金相顯微鏡BX53M產(chǎn)品應(yīng)用:
反射光顯微鏡檢查涵蓋的應(yīng)用和行業(yè)非常廣泛,下面僅選擇了使用不同觀察方法效果的部分示例。暗場(chǎng)觀察表面貼裝基板:DF 暗場(chǎng)能夠觀察標(biāo)本上的散射或衍射光。任何不平整的部位都會(huì)反射這種光,而平整的部位則顯得很暗,因此缺陷部位就會(huì)清晰地顯示出來。用戶甚至可以識(shí)別出極細(xì)微的劃痕,或小到8nm級(jí)別的缺陷 – 比光學(xué)顯微鏡的分辨能力還要小。 因此,暗場(chǎng)是檢測(cè)標(biāo)本上細(xì)微劃痕或缺陷,以及鏡面標(biāo)本(包括晶圓)的理想工具。 | 微分干涉觀察球墨鑄鐵檢測(cè):DIC 微分干涉是一種顯微鏡觀察技術(shù),這種技術(shù)把明場(chǎng)觀察所不能檢測(cè)到的標(biāo)本高度差,變?yōu)楦〉駹罨蛉S圖像,改善了圖像襯度。該技術(shù)使用了偏光,并有三種專門定制設(shè)計(jì)的棱鏡可以選擇。它是檢查具有極細(xì)微高度差的標(biāo)本的理想工具,包括金相組織、礦石、磁頭、硬盤介質(zhì)和拋光晶圓表面。 |
熒光觀察半導(dǎo)體晶圓上的顆粒異物:FL 該技術(shù)用于通過專用濾色片激發(fā)塊照明,使標(biāo)本能夠發(fā)出熒光(發(fā)出不同波長的光),特定的激發(fā)塊可用于特定的應(yīng)用。它適合于檢查半導(dǎo)體晶圓上的異物、光阻殘留物,以及通過熒光染料檢測(cè)裂縫。可以選配復(fù)消色差集光鏡系統(tǒng)的燈箱,以補(bǔ)償從可見光到近紅外光的色差。 | 紅外光觀察電極切片:IR IR觀察是非破壞性地檢查可以透過紅外光的硅材料或玻璃材料構(gòu)成的電子元器件內(nèi)部的方法。 |
透射光觀察LCD彩色濾光片:TLBF+HDR 對(duì)于透明樣品,比如LCD、塑料和玻璃材料,可以使用各種聚光鏡進(jìn)行透射光觀察。組建一個(gè)光學(xué)系統(tǒng),實(shí)現(xiàn)透射光明場(chǎng)和偏光進(jìn)行樣品檢查非常方便。 | |